SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//- Buy Price(exc VAT)
tech sheet
Details
Seal Material
FKM
Operation
Normally Closed Bellows Seal
Body Material
Aluminium
Brand
SMC
Series
XL2
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Length mm
Height mm
Width mm
Actuation
Operation
Seal Type
Feature
Actuator Working Temperature
Ambient Temperature
Angle
Valve Material
List Price
High Vacuum Angle Valve
–
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
98
66
171
Single acting
Normally Closed
Bellows seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
–
–
–
Available to Order
–
104
66
171
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
5 to 60°C
–
–
–
Available to Order
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
5 to 60°C
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
77
48
121
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
60
38
108
Single acting
Normally Closed
–
Bellows seal
–
5 to 60°C
Angle Valve
Aluminium
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
–
–
Normally Closed
Bellows seal
–
–
–
–
–
Available to Order
–
74
48
121
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
–
–
–
–
–
5 to 60°C
–
Normally Closed
–
Available to Order
–
–
–
–
–
Normally Closed Bellows Seal
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
–
Available to Order
High vacuum applications
–
–
–
Single acting
Normally Closed
–
Bellows seal
–
–
–
–
Available to Order
High Vacuum
–
–
–
–
Normally Closed Bellows Seal
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
–
Available to Order
–
98
66
171
–
–
–
–
–
–
–
–
Available to Order
–
59
38
108
Normally Closed
–
–
–
–
–
–
–
Available to Order