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M334-44977

SMC High Vacuum Angle Valve

Product Code: XLA-63-2M9//

 

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Available to Order

tech sheet

Details

Seal Material
FKM
Operation
Normally Closed, Single Acting, Bellows Seal
Body Material
Aluminium
Actuator Working Temperature
5 to 60°C
Brand
SMC
Series
XL2
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications

Specification

SMC High Vacuum Angle Valve, SMC