SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//- Buy Price(exc VAT)
tech sheet
Details
Seal Material
FKM
Length mm
60
Width mm
108
Feature
Bellows seal
Angle
Angle Valve
Body Material
Aluminium
Ambient Temperature
5 to 60°C
Height mm
38
Actuation
Single acting
Valve Material
Aluminium
Brand
SMC
Series
XL2
Manufacturer
SMC
Operation
Normally Closed
Application
High vacuum angle valve for semiconductor and vacuum applications
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Application
Length mm
Height mm
Width mm
Seal Type
Feature
Actuator Working Temperature
Actuation
Angle
List Price
Normally Closed Bellows Seal
High Vacuum Angle Valve
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed
–
98
66
171
Bellows seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
–
Single acting
–
Available to Order
–
–
104
66
171
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
5 to 60°C
–
–
Available to Order
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
Available to Order
–
–
–
–
–
–
–
–
Normally Closed
–
Available to Order
–
–
77
48
121
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed
High Vacuum
–
–
–
Bellows seal
–
–
–
–
Available to Order
–
–
74
48
121
–
–
–
–
–
Available to Order
–
High Vacuum
–
–
–
–
–
5 to 60°C
–
Normally Closed
Available to Order
Normally Closed Bellows Seal
–
–
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
Available to Order
Normally Closed
High vacuum applications
–
–
–
–
Bellows seal
–
Single acting
–
Available to Order
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
Available to Order
–
–
98
66
171
–
–
–
–
–
Available to Order
–
–
59
38
108
–
–
–
Normally Closed
–
Available to Order