Details
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Model
XGT223-46236-1F
Series
XGT
Brand
SMC
Manufacturer
SMC
Valve Material
FKM (Gate O-ring Material)
Accessories
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Actuation
Material
Buy Price
Cassette Type Standard
Gate O-ring FKM
£15,516.07
Available to Order